| 摘要 |
PURPOSE:To work the both sides of a work with extremely high accuracy in a short time without any working distorsion, etc., by making a carrier rotatable with its following up to the rotations of both polishing members and also moving it with its reciprocation between the carrier and polishing members. CONSTITUTION:Polishing members 10, 20 interposing a work 1 from the upper and lower sides are rotated in the same direction by motors 13, 22 and also a carrier 2 supporting the work 1 is made freely rotatable. An unreasonable polishing force is thus not applied between the polishing members 10, 20 and work 1. However, the work 1 can not be polished in the state of as it is. Now, the work 1 is moved with its reciprocation relatively by a motor 3 in the horizontal direction to the polishing members 10, 20 while under rotation of the polishing members 10, 20. The both sides of the work 1 is thus polished, with the polishing members 10, 20 being slipped on the surface of the work 1, with difference being caused in the peripheral speeds of each point in the work 1 of the polishing members 10, 20 and with the rotation center of the both 1 and (10, 20) being slipped. |
