发明名称 METAL LAYER CONNECTING METHOD USING MULTI-LAYER PHOTOLITHOGRAPHIC TECHNICS
摘要 The method comprises the steps of forming a conductor (2), an undoped conductor (3), a nonconductor (4) with uneven surface and a conductor (5) on a substrate (1) sequently, coating a photoresist (6) onto the conductor and nonconductor layers (5,4) to form a first window of the photoresist on the bent portion of the nonconductor (4), etching the exposed nonconductor portion to remove the photoresist (6), coating a second photo resist (11) thereon forming a second window on the etched portion, applying a metal (12) on the whole surface of substrate and removing the second photoresist (11), thereby connecting the metal layer to other portions.
申请公布号 KR920002026(B1) 申请公布日期 1992.03.09
申请号 KR19880009160 申请日期 1988.07.21
申请人 SAM SUNG ELECTRONICS CO., LTD. 发明人 PARK, HAN - SOO;HONG, JUNG - IN
分类号 H01L21/283;(IPC1-7):H01L21/283 主分类号 H01L21/283
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