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发明名称
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摘要
申请公布号
JPH0474444(A)
申请公布日期
1992.03.09
申请号
JP19900188352
申请日期
1990.07.17
申请人
SHINKO ELECTRIC IND CO LTD
发明人
WADA NORIO;KOYANAGI KAZUO
分类号
H01L21/60;H01L21/603;H05K3/40
主分类号
H01L21/60
代理机构
代理人
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地址
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