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发明名称
WAFER PROBER
摘要
申请公布号
JPH0472645(A)
申请公布日期
1992.03.06
申请号
JP19900186487
申请日期
1990.07.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHII MOTOHARU
分类号
G01R31/26;G01R1/073;H01L21/66
主分类号
G01R31/26
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