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发明名称
DIGITAL ETCHING PROCESS
摘要
申请公布号
JPH0472726(A)
申请公布日期
1992.03.06
申请号
JP19900186512
申请日期
1990.07.13
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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