| 摘要 |
PURPOSE:To prevent a strain from being generated on a sample at a time for holding it and to form a required film in a range over the whole surface of the sample on which the film is formed by forming a sample holder so that only the outer- circumferential edge part of the sample can be pinched and held without almost giving external force. CONSTITUTION:In a first member 10, an aperture 11 having a dimension and a shape capable of inserting and detaching a sample 20 is provided and a protrusion 13 having such a dimension and a shape that insertion and detachment of the sample into/from the aperture 11 are not inhibited is provided to the side of the aperture 11. Further in a second member 30, a part corresponding to only the outer-circumferential edge part of one face of the sample 20 is provided. Furthermore in a third member 40, a part for catching both the above-mentioned part of the member 30 and the outer- circumferential edge part of the sample 20 is provided. A fourth member 5 is provided so that it can be restrained to both the part excepting the above-mentioned respective parts of the members 30, 40 and the protrusion 13 and also can be attached and detached to/from the side of the aperture 11. As a result, since only the outer- circumferential edge part of the sample can be pinched and held without almost giving external force, a stain can be prevented from being generated on the sample at a time for holding it. |
