PRODUCTION OF ARTICLE HAVING SILICON CARBIDE FILM,申请号JP19900124345-传众专利搜索

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发明名称	PRODUCTION OF ARTICLE HAVING SILICON CARBIDE FILM
摘要
申请公布号	JPH0472067(A)	申请公布日期	1992.03.06
申请号	JP19900124345	申请日期	1990.05.15
申请人	TOAGOSEI CHEM IND CO LTD	发明人	NISHINO SHIGEHIRO;HARADA MASAYOSHI;TOSHIDA YOSHIKAZU;SUZUKI HIROSHI
分类号	C23C16/32	主分类号	C23C16/32
代理机构		代理人
主权项
地址

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