Flexible diaphragm micro-pump esp. for electrically insulating liq. - has micro-mechanical structure with pumping chamber of defined vol. between alternately opened tongue or paddle valves

摘要

Two wafers (1,2) of crystalline Si are etched anisotropically with a central chamber (6) between movable diaphragms (3a,3b) on which capacitive electrodes (4,5) are deposited. Two valves (7,8) are formed at opposite ends with square paddles joined to the wafer bodies by narrow necks (10,11), and are linked to the central chamber (6) by V-grooves (9). They operate in opposite modes, alternately open and closed when the diaphragms (3a,3b) are stretched. USE/ADVANTAGE - In administration of very small doses for biological, chemical or medicinal purposes. Device comprising only two main components can work with or without counterpressure and with vacuum.