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发明名称
VERFAHREN ZUR BILDUNG EINES FEINEN MUSTERS AUF EINEM HALBLEITER MIT EINER STUFE
摘要
申请公布号
DE4103565(A1)
申请公布日期
1992.03.05
申请号
DE19914103565
申请日期
1991.02.06
申请人
SAMSUNG ELECTRONICS CO., LTD., SUWON, KR
发明人
HAN, WOO-SUNG, SUWON, KR
分类号
G03F7/20;H01L21/027;H01L21/302;H01L21/3065
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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