发明名称 OPTICAL APPARATUS
摘要 <p>Optical apparatus for measuring the topographic properties of a surface uses a beam of coherent radiation which is split by a beam splitter (2) into a reference beam and a probe beam. The probe beam is modulated by a Bragg cell which is switched at two frequencies (φ1, φ2). A detector (6) recombines the components of the probe beam after reflection to produce a plurality of tone bursts the phase differences of which correspond to variations in the surface topography.</p>
申请公布号 WO1992003697(A1) 申请公布日期 1992.03.05
申请号 GB1991001410 申请日期 1991.08.20
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