BEAM ANNEALING DEVICE,申请号JP19880074237-传众专利搜索

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发明名称	BEAM ANNEALING DEVICE
摘要
申请公布号	JPH01246827(A)	申请公布日期	1989.10.02
申请号	JP19880074237	申请日期	1988.03.28
申请人	TOKYO ELECTRON LTD	发明人	KOSHIISHI MISA
分类号	H01L21/20;H01L21/268	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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