| 摘要 |
PURPOSE:To shorten polishing time and to improve working accuracy by detecting in advance the unevenness of the surface of the body to be worked as displacement data and performing the adjustment of polishing amt. by controlling the pressing of an abrasive pad according thereto. CONSTITUTION:A microdisplacement gage DELTA detecting the unevenness on the surface of the body P to be worked fitted to a spindle 1 as displacement data is provided on a feeding table 2. The displacement data measured by this microdisplacement gage 4 are stored at a displacement data memory part, the pressing state of an abrasive pad 3 to the body P to be worked is controlled based on the displacement data thereof and the polishing of the body P to be worked is executed. |
