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发明名称
PROCEDURE AND APPARATUS FOR ANNEALING OF SEMICONDUCTORS
摘要
申请公布号
EP0399662(A3)
申请公布日期
1992.03.04
申请号
EP19900304436
申请日期
1990.04.25
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
GRIM, KAREN A.;SCHWARTZ, BERTRAM;SINGH, SHOBHA;VAN UITERT, LEGRAND G.;ZYDZIK, GEORGE J.
分类号
H01L21/26;H01L21/00;H01L21/265;H01L21/324;(IPC1-7):H01L21/00
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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