| 摘要 |
PURPOSE:To accurately control exposure by measuring exposing energy with respect to each laser output pulse, obtaining remaining exposure based on target exposure and exposing energy integrated till previous time, calculating the energy of next one pulse and controlling the exposing energy of each pulse. CONSTITUTION:The target exposure is set and the total number P of pulses required for exposure is calculated. Next, the set energy of the first one pulse is calculated, the energy is set and a command for generating one pulse is given. Then, the number of light emitting times is counted up and the energy per one pulse is detected. The remaining exposure is calculated and the set energy of the next one pulse is calculated. Then, the number P of pulses is compared with the number of times (m) of the pulses and when they become the same, exposure is performed. |
