Process for growing crystalline thin film.

摘要

A process for growing a crystalline thin film comprises forming a crystalline region comprising a single crystal-nucleus (3) or crystal-grain at a predetermined position of an amorphous thin film, then implanting ions of at least one element constituting the amorphous thin film into a region (4) other than the crystalline region and thereafter carrying out heat treatment to have the crystal-nucleus or crystal-grain grown along the plane direction of the amorphous thin film, thereby crystallizing the amorphous film by solid phase growth.