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发明名称
METHOD AND DEVICE FOR ALUMINUM DRY ETCHING
摘要
申请公布号
JPH0468525(A)
申请公布日期
1992.03.04
申请号
JP19900181902
申请日期
1990.07.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAKAYAMA ICHIRO;YAMADA YUICHIRO;HOUCHIN RIYUUZOU
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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