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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH02306652(A)
申请公布日期
1990.12.20
申请号
JP19890129135
申请日期
1989.05.22
申请人
NEC CORP
发明人
HINOOKA KIYONOBU
分类号
H01L21/768;H01L23/522
主分类号
H01L21/768
代理机构
代理人
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