EXPOSURE APPARATUS WITH A SUBSTRATE HOLDING MECHANISM,申请号US19900550989-传众专利搜索

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发明名称	EXPOSURE APPARATUS WITH A SUBSTRATE HOLDING MECHANISM
摘要
申请公布号	US5093579(A)	申请公布日期	1992.03.03
申请号	US19900550989	申请日期	1990.07.11
申请人	CANON KABUSHIKI KAISHA	发明人	AMEMIYA, MITSUAKI;HARA, SHINICHI;SAKAMOTO, EIJI
分类号	H01L21/30;G03F7/20;H01L21/027;H01L21/683	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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