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发明名称
METHOD FOR CALIBRATING PHASE MODULATING MECHANISM IN FRINGE SCANNING INTERFERENCE MEASURING METHOD
摘要
申请公布号
JPH0466803(A)
申请公布日期
1992.03.03
申请号
JP19900178806
申请日期
1990.07.06
申请人
KONICA CORP
发明人
YOSHIDA TAKASHI
分类号
G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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