| 摘要 |
PURPOSE: To improve working efficiency and to make flexible operation by mounting an end effector on shafts that are in parallel and are suspended and separated, moving them independently along a horizontal shaft, and moving a gripping mechanism at an arbitrary rotary angle. CONSTITUTION: A gripping mechanism 10 can be rotated freely around a Z-axis and can be moved along the Z-axis. The gripping mechanism 10 has first and second gripping members (end effectors) W1 and W2 , and these are mounted on a guide path placed on a substrate 12 and move independently along an R-axis, thus gripping wafers S1 and S2 and carrying them from a cassette or a workstation at a supply source to a cassette or a workstation at a delivery destination. Guide rails G1 and G2 are arranged on the upper surface of the substrate 12, in parallel with the R-axis and with a gap. The guide rails G1 and G2 support and guide the gripping members W1 and W2 , when the members move. The members W1 and W2 are forced to advance or retreat selectively from its initial position to an advance position by a mechanical drive source.
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