| 摘要 |
PURPOSE:To form a contact hole having a beautiful shape at a high speed without necessity of a precise control by providing ultraviolet band laser light oscillating means, visible light band laser light oscillating means, etc. CONSTITUTION:After a laser light emitted from a laser oscillator 101 is incident to an SHG cell 102, it is reflected on a partial reflecting mirror 103 and a totally reflecting mirror 105, and incident to expanders 106b and 106a. Then, the expander 106a outputs a fourth harmonic laser light (ultraviolet laser light), and the expander 106b outputs a second harmonic laser light (visible laser light). It is so regulated that the visible laser light reaches at a sample 116 in delay of a predetermined time from the ultraviolet laser light. When the ultraviolet laser light reaches, the sample 116 is started to be evaporated from the surface to open a hole having a predetermined depth. When the visible laser light reaches, an explosion force is generated to blow out an interlayer insulating film, etc., thereby forming a contact hole. Thus, the contact hole having a beautiful shape can be formed at a high speed. |
