| 摘要 |
A thermal detector array comprises discrete thermal detector elements arranged in a two-dimensional array, each element 1 being supported on one side of a layer 3 of resilient low thermal conductivity material which serves also to space said elements apart from one another, an opposite side of said layer carrying a common electrode structure 5 which is in contact with each element and provides interconnections therebetween by means of high thermal resistance electrically conductive tracks 7, each element 1 having an element electrode 9 which is in contact with an inwardly facing surface of the element, each element electrode 9 being connected by means of a bonding member 13 to an input circuit 15 of a semiconductor substrate 11, such that the said bonding members 13 serve to support the layer 3 with respect to the substrate 11, and each element 1 having a radiation absorber 17 associated therewith. <IMAGE> |
