| 摘要 |
PURPOSE:To obtain a silicon carbide heater excellent in anti-oxidation property, corrosion resistance and thermal conductivity by sintering a mixture composed of the general silicon carbide powder having a specified particle size and the silicon carbide powder manufactured by vapor-phase reaction having a specified particle size and manufacturing the electric heater with this sintered body. CONSTITUTION:This silicon carbide heater is sintered without addition of a sintering auxiliary and composed of the silicon carbide sintered body having >=2.8 kg/cm<2> density of the sintered body and <=10OMEGA cm of the electric specific resistance at room temperature. The silicon carbide heater is obtained by a process as follows. That is, a first silicon carbide powder 0.1-10 mum of particle size, a second silicon carbide powder having 0.1 mum of a mean particle size obtained by the vapor-phase reaction by introducing a gaseous raw material composed of silane compounds or silicon halide and hydrocarbons into plasmas in non-oxidative atmosphere and controlling the pressure of a reaction system is in the range of 1 atm to 0.1 Torr are mixed, then the mixture is heated and sintered to manufacture the silicon carbide sintered body and this sintered body is used as the electric heater. |
