| 摘要 |
PURPOSE:To easily and stably obtain a sintered compact having high thermal conductivity by sintering a green compact prepared by adding alkaline earth compound and rare earth compound to AlN powder under an inert atmosphere in which an AlN sintered compact where the content of oxygen as impurity is regulated to a value below a specific value and graphite as allowed to coexist. CONSTITUTION:A green compact prepared by adding alkaline earth compound and/or rate earth compound to an AlN powder is sintered under an inert atmosphere where an AlN sintered compact containing <0.5 wt.% oxygen as impurity and graphite are allowed to coexist. By this method,the above additives are changed into multiple oxides, such as alkaline earth aluminate and rare earth aluminate, and removed, at the time of the completion of sintering, from the system of a sintered compact by the action of trace amounts of carbon gas generated from the graphite. Further, the reduction in the weight of the AlN sintered compact to be obtained can be prevented owing to the coexisting AlN sintered compact, and also the reduction in thermal conductivity as well as the occurrence of irregular color in the AlN sintered compact to be obtained can be prevented. |
