| 摘要 |
PURPOSE:To detect a developing condition of a resist film by a developing solution based upon a change in a vibration resonance frequency by dipping the piezoelectric vibration on which the resist film is deposited into the resist developing solution. CONSTITUTION:A piezoelectric vibrator 4 is constructed by providing electrodes 2, 3 facing each other on opposite surfaces of a disk-shaped substrate 1 comprising crystal and the like. A resonance frequency of the piezoelectric vibrator 4 is monitored by dipping the piezoelectric vibrator 4 which surface is coated with a resist film 6 in a developing solution 7 and developing the resist film 6. With such construction, deterioration of the resist developing solution, i.e., the developing ability of the developing solution can be known by a change in the resonance frequency of the piezoelectric vibrator. |
