| 摘要 |
PURPOSE:To efficiently preliminarily ionize in a discharging region and to improve a laser output by oppositely disposing a pair of preliminarily ionizing pins substantially in parallel with a laser beam propagating direction to a preliminarily ionizing electrode. CONSTITUTION:Preliminarily ionizing electrodes 7 are disposed at both sides of a discharge electrode 1, and disposed oppositely to a rodlike preliminarily ionizing pin 17 and a preliminarily ionizing pin 19 formed in an inverted L state substantially in parallel with a laser beam 15 at a discharge distance l. Thus, since a preliminarily ionizing arc 21 is generated between the distance lin a direction substantially parallel to a laser beam propagating direction, the discharge region extended in the laser beam propagating direction is preliminarily ionized more uniform than that of prior art. Accordingly, since the beam width can be increased in response to the size of an exciting region width, a laser output can be improved as compared with that in the prior art. |
