| 摘要 |
<p>PURPOSE:To reduce the damage of a substrate and the downtime of an equipment, by optimally controlling the conveying speed of a substrate according to the relation between substrate sucking pressure and main pressure. CONSTITUTION:A pressure sensor 24 is installed, which measures the pressure in the vicinity of a finger 20 of negative pressure sent to the finger 20, and converts the measured pressure into an analog electric signal. A pressure sensor 26 is installed, which measures this side pressure of a solenoid valve 22 of negative pressure sent to the finger 20, i.e., main pressure, and converts the measured pressure into an analog electric signal. A CPU 40 takes in digital signals from A/D converters 25, 27 in response to the operation command from the high order, and gives command to a controller 32 in order that the finger 20 may suitable operate. The CPU 40 outputs driving command also to a driver 23 in order to control the operation of the solenoid valve 22.</p> |
