FORMING METHOD OF THIN-FILM,申请号JP19900177182-传众专利搜索

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发明名称	FORMING METHOD OF THIN-FILM
摘要
申请公布号	JPH0464221(A)	申请公布日期	1992.02.28
申请号	JP19900177182	申请日期	1990.07.04
申请人	TOKYO ELECTRON LTD;TEL VARIAN LTD	发明人	MATSUSE KIMIHIRO
分类号	C23C16/52;H01L21/205;H01L21/285	主分类号	C23C16/52
代理机构		代理人
主权项
地址

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