| 摘要 |
PURPOSE:To prepare an AlN sintered product having high thermal conductivity and high strength by adding an oxide sintering auxiliary and a prescribed amount of alpha-alumina powder of a regulated average particle diameter to an Al powder having a regulated average particle diameter, a regulated impurity oxygen content and a regulated cationic impurity content, and subsequently sintering the mixture. CONSTITUTION:Aluminum nitride powder having an average particle diameter of <=5 mum, an impurity oxygen content of <=3wt.% and a cationic impurity content of <= 0.3wt.% as a main component is mixed with a rare earth element or alkaline earth metal oxide sintered product auxiliary (e.g. Y2O3) and further with 0.6-5 wt.% of alpha-alumina powder having an average particle diameter of 5<=mum. The mixture is mixed with additives such as a binder, molded and then sintered to prepare an aluminum nitride sintered product having high thermal conductivity and high strength, which is suitably employed for highly thermal conductive insulated boards, etc., in fields requiring high heat-releasing characteristics for various semiconductors. |
