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发明名称
MAGNETRON SPUTTERING SYSTEM
摘要
申请公布号
JPH0463273(A)
申请公布日期
1992.02.28
申请号
JP19900173874
申请日期
1990.06.30
申请人
MITSUBISHI KASEI CORP
发明人
ARITA YOJI
分类号
C23C14/35;H01L21/203
主分类号
C23C14/35
代理机构
代理人
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