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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0464223(A)
申请公布日期
1992.02.28
申请号
JP19900179012
申请日期
1990.07.04
申请人
FUJITSU LTD
发明人
OHIRA SHINYA
分类号
C23C16/14;H01L21/28;H01L21/285
主分类号
C23C16/14
代理机构
代理人
主权项
地址
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