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发明名称
DIELECTRIC ISOLATING BOARD AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0464247(A)
申请公布日期
1992.02.28
申请号
JP19900175218
申请日期
1990.07.04
申请人
HITACHI LTD
发明人
SHIRASAWA TOSHIKATSU;SEKINE SHIGEKI;ISHIKAWA TORU
分类号
H01L21/762;H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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