| 摘要 |
PURPOSE:To enhance developability and to decrease the residual films after developing by incorporating a high-molecular straight chain acid anhydride into the photosensitive compsn. CONSTITUTION:A quinone diazide compd. (A) as a photosensitive component, an alkali-soluble resin (B) as a binder and the high-molecular straight chain acid anhydride (C) as a residual film improving agent are incorporated into this compsn. A compd. having an o-naphthoquinone diazide group, etc., are usable for the component A, a novolak resin, etc., for the component B and the compd. of formula, etc., for the component C, respectively. |
