发明名称 CERAMIC SUBSTRATE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To execute a high-speed operation by a method wherein a sealing glass is provided on a ceramic substrate via an electrode in a mesh-shaped pattern. CONSTITUTION:A mesh-shaped electrode 2 is formed on a ceramic substrate 1 by using a mesh-shaped pattern plate. Then, the upper part of the mesh-shaped electrode 2 and the outer circumferential part of the ceramic substrate 1 are coated, by using a screen-printing method or the like, with a sealing glass paste to be used as a sealing glass 3. The paste is heated; a ceramic substrate 9 is formed. On the other hand, the outer circumferential part of a ceramic lid 5 is coated, by using a screen-printing method or the like, with a sealing glass paste to be used as a sealing glass 3 used to airtightly seal a semiconductor element 6; and the paste is heated and formed. Then, the semiconductor-element mounting face of the ceramic substrate 9 is coated with a diapositive touch material 7; the semiconductor element is mounted on the material; the semiconductor element 6 and the lead frame 4 are connected by using wires 8; and after that, the ceramic lid 5 provided with the sealing glass 3 is mounted on a prescribed position; this assembly is heated; the semiconductor element is sealed airtightly.
申请公布号 JPH0462949(A) 申请公布日期 1992.02.27
申请号 JP19900173121 申请日期 1990.06.30
申请人 NARUMI CHINA CORP;SUMITOMO METAL IND LTD 发明人 YOKOCHI MASAO;TAKAHASHI EIJI;TAMURA YOICHI
分类号 H01L21/48;H01L21/60;H01L23/12 主分类号 H01L21/48
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