| 摘要 |
PURPOSE:To lessen variation of the resistance value in the anti-environmental performance of an electroconductive film by giving an electroconductive membrane a specific resistance of 3X10<-4> thru 5X10<-4>OMEGAcm. CONSTITUTION:An electroconductive membrane is given a specific resistance of 3X10<-4> thru 5X10<-4>OMEGAcm and also a surface resistance change rate below 1.2 during a high temp. heat treatment (150 deg.C, 3hr). In formation of this electroconductive membrane, control is made with a surface resistance monitor and a film formation speed monitor so that the specific resistance becomes 3.0-5X10<-4>OMEGAcm. About the surface resistance change rate in high temp. heat treatment in the extent of the proper oxygen partial pressure and it is good if the specific resistance range is met. The surface resistance change rate will be under 1.2 if control is made in this extent of oxygen partial pressure. Thereby the surface resistance variation does not rise so great as twice even under such environmental conditions as high-temp. leaving (80 deg.C, 1000hr) and constant temp and constant humidity leaving (80 deg.C, 90%RH), and a stable membrane characteristics are maintained. |
