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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0461354(A)
申请公布日期
1992.02.27
申请号
JP19900173568
申请日期
1990.06.29
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIKAWA MASAHIKO;OZAKI ATSUSHI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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地址
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