| 摘要 |
PURPOSE:To reduce a drift which is caused by unnecessary vibration propagation by using piezoelectric ceramic which is sintered by isotropic hot hydrostatic pressing as an element for detection and driving. CONSTITUTION:The piezoelectric ceramic is formed by performing the isotropic hot hydrostatic pressing for >=1 hour under a condition of up to 300-500atm. within a temperature range from temperature which is 200 deg.C lower than sintering temperature where 85% ideal density is obtained to sintering temperature where 96% ideal density is obtained. This ceramic is used for elements 1 and 2, and 3 and 4 for detection and driving and those elements are joined together alternately and orthogonally into tuning fork structure. Consequently, the low-drift, high-accuracy angular velocity sensor which has superior mechanical shock strength is obtained while the generation of unnecessary vibration is suppressed. |
