| 摘要 |
PURPOSE:To miniaturize the device, to make a moving part light in weight, and to execute an access at a high speed by hybridizing a semiconductor laser, a monitor photodetector and a signal detecting photodetector on a silicon substrate having a V-shaped groove. CONSTITUTION:A monitor photodetector 4, and a signal photodetector 5 are formed on a silicon substrate 1 having a V-shaped groove 2, a semiconductor laser 3 is fixed, and also, subjected to wiring on a silicon substrate 1, and an emitted light front is attached so as to become parallel to the V-shaped groove 2. Accordingly, an emitted light from the front is emitted without being obstructed by the silicon substrate 1, reflected by the slant face of the V-shaped groove 2 and advances in the direction vertical to the substrate 1 surface. Subsequently, an emitted light from the rear face of the semiconductor laser 3 is inputted to the monitor photodetector 4, and the light quantity of the semiconductor laser 3 is monitored. Also, the reflected light is detected by the signal photodetector 5. In such a way, the device is miniaturized, the moving part is made light in weight, and the access can be executed at a high speed. |
