发明名称 |
ELLIPSOMETRIC CONTROL OF MATERIAL GROWTH |
摘要 |
A method and apparatus for controlling the growth of a multispecies film. During the film growth, an ellipsometer continuously monitors the surface on which the film is growing. The ellipsometer data is used to calculate the effective complex dielectric constant of the thin-film/substrate structure. A sequence of such data is used in a model calculation to determine the composition of the top portion of the thin film. The measured composition is compared with the target composition and the amount supplied of one of the species is correspondingly changed.
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申请公布号 |
US5091320(A) |
申请公布日期 |
1992.02.25 |
申请号 |
US19900538648 |
申请日期 |
1990.06.15 |
申请人 |
BELL COMMUNICATIONS RESEARCH, INC. |
发明人 |
ASPNES, DAVID E.;QUINN, WILLIAM E. |
分类号 |
C30B23/08;C23C14/54;C23C16/52;C30B23/00;C30B25/16;G01B11/24;G01J4/04;G01N21/00;H01L21/203;H01L21/205 |
主分类号 |
C30B23/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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