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发明名称
Reduced path ion beam implanter
摘要
申请公布号
US5091655(A)
申请公布日期
1992.02.25
申请号
US19910660738
申请日期
1991.02.25
申请人
EATON CORPORATION
发明人
DYKSTRA, JERALD P.;RAY, ANDREW M.;KING, MONROE L.
分类号
H01J37/12;H01J37/30;H01J37/317;H01L21/265
主分类号
H01J37/12
代理机构
代理人
主权项
地址
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