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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE HAVING METAL LAYER OF LAMINATED STRUCTURE
摘要
申请公布号
JPH0456135(A)
申请公布日期
1992.02.24
申请号
JP19900163374
申请日期
1990.06.21
申请人
NEC CORP
发明人
AKIMOTO KENJI
分类号
H01L21/3213;H01L21/3205
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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