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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH0456773(A)
申请公布日期
1992.02.24
申请号
JP19900165072
申请日期
1990.06.22
申请人
SUMITOMO ELECTRIC IND LTD
发明人
UKEKAWA JIHEI
分类号
C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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