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发明名称
SEMICONDUCTOR MANUFACTURE DEVICE
摘要
申请公布号
JPH0456316(A)
申请公布日期
1992.02.24
申请号
JP19900170909
申请日期
1990.06.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUKI TOMOYOSHI
分类号
H01L21/205;H01L21/285;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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