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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0456213(A)
申请公布日期
1992.02.24
申请号
JP19900167152
申请日期
1990.06.25
申请人
MATSUSHITA ELECTRON CORP
发明人
MURAKAMI ISAO
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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