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发明名称
RISE OF MASS PRODUCTION IN SEMICONDUCTOR MANUFACTURING PROCESS, INSPECTION OF FOREIGN SUBSTANCE IN MASS PRODUCTION LINE AND DEVICE THEREOF
摘要
申请公布号
JPH0456245(A)
申请公布日期
1992.02.24
申请号
JP19900165743
申请日期
1990.06.26
申请人
HITACHI LTD
发明人
NOGUCHI MINORU;KENBO YUKIO;MORIOKA HIROSHI;YAMAGUCHI HIROSHI;KONO MAKIKO;OSHIMA YOSHIMASA
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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