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经营范围
发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0456161(A)
申请公布日期
1992.02.24
申请号
JP19900165236
申请日期
1990.06.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
GOI YOICHI
分类号
G01R31/26;H01L21/66;H01L21/822;H01L21/8238;H01L27/04;H01L27/092
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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