| 摘要 |
PURPOSE:To provide a small-sized and highly sensible angular velocity sensor. CONSTITUTION:When an AC voltage is applied across a driving element 201, the element 201 vibrates a beam section 102 for drive. The vibration of the section 102 vibrates a weight section 107 through a repeating weight section 103 and beam sections 104 and 105 for detection. When the title sensor is rotated in the direction 109 while the weight section 107 vibrates, the section 107 generates a Coriolis force. The Coriolis force deforms the beam sections 104 and 105. The deformation of the sections 104 and 105 is detected by means of an angular velocity detecting element 203 as an angular velocity. By folding the weight section 107 which contributes to the vibrations at the repeating weight section 103 and coupling the folded parts by means of the beam sections 104 and 105, the lengths of the beam sections 104 and 105 are increased so as to improve the detecting sensitivity of the sensor and the size of the sensor is improved. |
