| 摘要 |
PURPOSE:To enlarge and display a desired position of a defect part and to handle even a continuous defect by providing a deciding means which divides an image signal of the surface of a material to be inspected into plural blocks and finds the block containing the detected defect. CONSTITUTION:The reflected light of laser light is detected by a photodetector 68 and amplified, and its waveform is shaped, so that a defect deciding means 76 detects whether or not there is a defect. The block deciding means 78 finds the block which contains the coordinates (address) of a defect signal pulse. Then a cutting control means 88 transfers data from a bulk memory 82 to a frame memory 86 so that the block of the defect signal comes to a specific position on a monitor 92; and a D/A converter 90 performs conversion into an analog image signal (c), which is displayed on a monitor 92. Consequently, an image of the block which contains the defect is enlarged and displayed at a specific position on the monitor, and whether or not there is a defect, its size and kind, etc., and even a long defect are confirmed. |
