MOVING TABLE AND METHOD OF DRIVING THE SAME

摘要

PURPOSE:To move parallel and turn a material by projecting two parallel cylindrical piezoelectric elements of the same shape on a base, with the mounts of the free ends thereof flush, and selecting a voltage applying electrode from the two piezoelectric elements. CONSTITUTION:A sample mount 9 is across the mounts of two piezoelectric elements 5 and 6 and the mounts and the sample mount 9 thereon can be moved horizontally in arbitrary two directions on one plane by moving the piezoelectric elements 5 and 6 in the same direction. That is, the piezoelectric elements 5 and 6 are moved in the directions of Y2 and X2 The sample mount 9 can be turned on one plane by moving the piezoelectric elements 5 and 6 in opposite directions of X1 and X2 respectively.