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发明名称
(A) ;PRODUCTION OF EPSILON-CAPROLACTONE
摘要
申请公布号
JPH049378(B2)
申请公布日期
1992.02.20
申请号
JP19810023017
申请日期
1981.02.20
申请人
发明人
分类号
H01L21/331;H01L21/8222;H01L27/082;H01L29/10;H01L29/73
主分类号
H01L21/331
代理机构
代理人
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地址
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